Diagnostic techniques for semiconductor materials and devices (Montreal PQ, 6-8 May 1997)Rai-Choudhury, P; Benton, J.L; Schroder, D.K et al.SPIE proceedings series. 1997, isbn 0-8194-2765-9, IX, 478 p, isbn 0-8194-2765-9Conference Proceedings

Characterization challenges for the ULSI ERASHAFFNER, T. J.SPIE proceedings series. 1997, pp 1-15, isbn 0-8194-2765-9Conference Paper

Direct observation and elimination of defects in gate oxide for reliable moslsisITSUMI, M.SPIE proceedings series. 1997, pp 147-159, isbn 0-8194-2765-9Conference Paper

Monitoring techniques of corrosive species affecting integrated circuit metal lithographyMAUTZ, K. E.SPIE proceedings series. 1997, pp 429-440, isbn 0-8194-2765-9Conference Paper

Monitoring and reduction of alkali metal contamination in dielectric oxidesMAUTZ, K. E.SPIE proceedings series. 1997, pp 68-79, isbn 0-8194-2765-9Conference Paper

New concerns for detection of pinholes in the passivation layer of IC'sSABIN, E.SPIE proceedings series. 1997, pp 419-428, isbn 0-8194-2765-9Conference Paper

Identification and quantification of trace metal impurities in silicon using the ELYMAT lifetime measurementGUPTA, D. C.SPIE proceedings series. 1997, pp 267-279, isbn 0-8194-2765-9Conference Paper

Silicon on insulator characterization techniques and resultsWETTEROTH, T.SPIE proceedings series. 1997, pp 177-186, isbn 0-8194-2765-9Conference Paper

Carrier density and thermal images of transient filaments in GaAs photoconductive switchesFALK, R. A; ZUTAVERN, F. J; O'MALLY, M. W et al.SPIE proceedings series. 1997, pp 243-254, isbn 0-8194-2765-9Conference Paper

EBIC and TEM study of process induced defects in SOI wafersBONDARENKO, I. E; KONONCHUK, O. V; ROZGONYL, G. A et al.SPIE proceedings series. 1997, pp 32-38, isbn 0-8194-2765-9Conference Paper

Defects induced by arsenic ion implantation and thin film-edge stressesCHANG, G; AL, R; CHIOU, H.-D et al.SPIE proceedings series. 1997, pp 123-131, isbn 0-8194-2765-9Conference Paper

Electrical impedance spectroscopy of siliconVEDDEL, J; VISCOR, P.SPIE proceedings series. 1997, pp 365-376, isbn 0-8194-2765-9Conference Paper

An enhanced system for automated wafer particle and crystalline defect inspectionLIE DOU; BATES, E.SPIE proceedings series. 1997, pp 193-203, isbn 0-8194-2765-9Conference Paper

In-line measurement of epitaxial silicon-germanium thin films by spectroscopic ellipsometryLIAW, H. M; YGARTUA, C.SPIE proceedings series. 1997, pp 160-170, isbn 0-8194-2765-9Conference Paper

Novel analytical study on in-process deep submicron gate oxide by atomic force microscopyEBERHARDT, E. P; WALL, K. M.SPIE proceedings series. 1997, pp 114-122, isbn 0-8194-2765-9Conference Paper

Recombination phenomena in Si GaAs : The approach of the advanced method of transient microwave photoconductivity (AMTMP)CRABTCHAK, S; COCIVERA, M.SPIE proceedings series. 1997, pp 235-242, isbn 0-8194-2765-9Conference Paper

Comparisow of SIMS and GF-AAS for the evaluation of gettering of Fe, Ni and co in polysilicon backsideOKUVCHI, S; SHABANI, M. B; YOSHIMI, T et al.SPIE proceedings series. 1997, pp 39-48, isbn 0-8194-2765-9Conference Paper

Noise as a spectroscopic tool for semiconductor characterisationCLAEYS, C; SIMOEN, E.SPIE proceedings series. 1997, pp 324-341, isbn 0-8194-2765-9Conference Paper

Diffusion and out-diffusion behavior of Fe in Si wafer for different annealingYOSHIMI, T; SHABANI, M. B; OKUUCHI, S et al.SPIE proceedings series. 1997, pp 452-457, isbn 0-8194-2765-9Conference Paper

Practical metrology aspects of scanning capacitance microscopy for silicon 2-D dopant profilingKOPANSKI, J. J; MARCHIANDO, J. F; ALVIS, R et al.SPIE proceedings series. 1997, pp 102-113, isbn 0-8194-2765-9Conference Paper

Use of the contact potential difference probe to evaluate and minimize plasma damageFLORENCE, R. G; BAILEY, D. E.SPIE proceedings series. 1997, pp 350-356, isbn 0-8194-2765-9Conference Paper

An integrated spatial signature analysis and automatic defect classification systemGLEASON, S. S; TOBIN, K. W; KARNOWSKI, T. P et al.SPIE proceedings series. 1997, pp 204-211, isbn 0-8194-2765-9Conference Paper

Cyclic I-V and Q-V : New techniques for characterizing ultra-thin oxidesOKANDAN, M; MERRIT, M; FONASH, S et al.SPIE proceedings series. 1997, pp 295-309, isbn 0-8194-2765-9Conference Paper

Digital averaging and recording of DLTS signalsKOLEV, P; DEEN, M. J; ALBERDING, N et al.SPIE proceedings series. 1997, pp 377-388, isbn 0-8194-2765-9Conference Paper

Investigation of copper gettering using radio isotope and step-etching method in hydrogen-annealed and pbs, bsd treated silicon wafersSHIMOI, N; KOBAYASHI, N; MURAOKA, H et al.SPIE proceedings series. 1997, pp 412-418, isbn 0-8194-2765-9Conference Paper